Electronics, Models and Testing for Micro/Nano Systems (EFRO Meteoriet)

Bison code: L.28184

Context/current situation:

Our partners, The Netherlands Space Research Organisation (SRON), Salland Engineering, Bronkhorst, Maser and the University of Twente are teaming up together with the Research Chair NanoPhysics Interfaces @ the Saxion to investigate, on a long-term basis, how MEMS and NEMS devices (see photos) can be designed, tested and assembled in a reliable, safe but cost-effective way. We look into all aspects of the Smart Industry revolution (3D printing, configurable electronics, new production techniques, digital twinning) for this purpose.

Specifically, we focus on implementing wafer test of MEMS devices using the combination of electronic probing and FEM modelling (twinning).

Problem statement:

There are several different challenges that we need to tackle:

  1. Find efficient ways to test mechanical/fluidic/optical MEMS sensors using purely electronic probing, implement those tests
  2. Reduce the complexity/build FEM models of MEMS devices in specialist software
  3. Implement novel wafer probing methods like for e.g. infrared vision

The students will work towards solving one or more of these challenges as laid out by our industrial partners. Depending on the first meeting with our Research Chair members as well as the interest or makeup of the group, we shall define exact project tasks.

Project or research goal:

Previous groups already worked on several aspects of this project so the new groups can build on their results.

The goal of this student project is to address the problem statement by either defining a research question or via a design/implementation (V-model) approach. The exact type depends on what aspect a)-c) will be chosen as well as the makeup of the group.

Project results:

We expect research or design reports, data or – if so agreed at the start – a physical deliverable like a measurement setup or instrument.

Cluster: Industrial Automation